Innovations
High Cleanness-Degree Cleaning and Packaging for Target

As sputtering target is used in a high-vacuum and high-cleanness environment, it has a strict requirement on the target cleanliness.

With advanced cleaning and packaging technology, KFMI target surface cleanliness reaches the electronic grade, which conforms to the semiconductor industry application requirements. KFMI’s cleaning system can fully prevent targets from any scratch during the cleaning process.

KFMI’s cleaning system equips with a cleaning fluid recycle device, which complies with not only the environmental protection requirement, but also the safety management requirement.