Purification of Ultra-High Purity Metal Materials

LSI (Large Scale Integration) with area less than 1 cm2 consists of tens of thousands of metallic conductors whose width is less than 100nm. The unique property determines its raw material, sputtering targets, should be ultra-high purity metal.

Purity of our sputtering targets can reach the below grades:

Our current raw material suppliers are all top level companies world widely. KFMI is also working on develop purification technologies independently . KFMI have successfully produced ultra-high purity Titanium with the purity of 99.999%, and Oxygen content less than 50ppm.