Semiconductor Targets
Semiconductor Targets


High Purity Aluminum & Aluminum Alloy Targets

Materials: Al, Al30ppmSi, Al0.5Si, Al0.75Si, Al0.8Si, Al1Si, Al0.5Cu and AlSiCu etc.

Purity: 4N ~ 5N5 (99.99% ~ 99.9995%)

Grain Size and Orientation: Upon Customer’s Demands

Highlight: Various customized long life targets available


High Purity Titanium Targets and Coils

Purity: 4N5 ~ 5N (99.995% ~ 99.999%), Low oxygen Titanium

Grain Size and Orientation: Upon Customer’s Demands

Highlight: Various customized long life targets and coils available


High Purity Cu and Cu Alloy Targets, Cu coils and Cu Anode

Purity: 4N (99.99%), 4N5 (99.995%), 5N (99.999%), 6N (99.9999%) and CuAl alloy

High purity Cu Anode and CuP Anode

High purity Cu coil

Grain Size and Orientation: Upon Customer’s Demands

Highlight: Various customized long life targets and Anode materials


High Purity Tantalum and Tantalum Alloy Targets and Tantalum Coils

Ta target and coil Purity: 3N ~ 5N (99.9% ~ 99.999%)

Grain Size and Orientation: Upon Customer’s Demands

Highlight: Various customized long life targets and coils available

Coil refurbish services are available for the most effective cost saving for our customers.


All kinds of special metal sputtering targets, including:

High purity W, Ti-W, Ni, Ni alloy, Cr and Coetc.